Integrated circuits with magnetic core inductors and methods of fabrications thereof
AssigneeInfineon Technologies AG
InventorsRenate Hofmann, Carsten Ahrens, Wolfgang Klein, Alexander Glas
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AssigneeInfineon Technologies AG
InventorsRenate Hofmann, Carsten Ahrens, Wolfgang Klein, Alexander Glas
Estimating the term…
In one embodiment, a method of forming a semiconductor device includes forming a first inductor coil within and/or over a substrate. The first inductor coil is formed adjacent a top side of the substrate. First trenches are formed within the substrate adjacent the first inductor coil. The first trenches are filled at least partially with a magnetic fill material. At least a first portion of the substrate underlying the first inductor coil is thinned. A backside magnetic layer is formed under the first portion of the substrate. The backside magnetic layer and the magnetic fill material form at least a part of a magnetic core region of the first inductor coil.
A method of forming a semiconductor device, the method comprising:
A method of forming a semiconductor device, the method comprising:
A method of forming a semiconductor device comprising:
Dependencies are inferred from the claim text.