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US 8,709,548 B1Granted
Method of making a CIG target by spray forming
AssigneeHanergy Holding Group Ltd.
InventorsA. Piers Newbery, Timothy Kueper, Daniel R. Juliano
Life of this patent
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Abstract
A method of making a sputtering target includes providing a backing structure, and forming a copper indium gallium sputtering target material on the backing structure by spray forming.
Claims22
A method of making a sputtering target, comprising:
- providing a backing structure, and
- forming a copper indium gallium sputtering target material on the backing structure by spray forming wherein:
- from 0% to 10% of primary phase regions in the sputtering target material are of a size greater than 30 μm in any random 1 cm by 1 cm area of the sputtering target;
- an average primary phase region in the sputtering target material is of a size not greater than 10 μm;
- and
- the sputtering target material has an overall uniform composition.
3 more elements
A method of making a sputtering target, comprising:
- providing a backing structure, and
- forming a copper indium gallium sputtering target material on the backing structure by spray forming, wherein:
- from 0% to 10% of primary phase regions in the sputtering target material are of a size greater than 10 μm in any random 1 cm by 1 cm area of the sputtering target;
- an average primary phase region in the sputtering target material is of a size between 0.5 and 10 μm;
- and
- the sputtering target material has an overall uniform composition.
3 more elements
A method of making a sputtering target, comprising:
- providing a backing structure, and
- forming a copper indium gallium sputtering target material on the backing structure by spray forming, wherein:
- from 1% to 5% of primary phase regions in the sputtering target material are of a size greater than 10 μm in any random 1 cm by 1 cm area of the sputtering target;
- an average primary phase region in the sputtering target material is of a size between 1 and 5 μm;
- and
- the sputtering target material has an overall uniform composition.
3 more elements
Dependencies are inferred from the claim text.