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US 8,709,538 B1Granted
Substantially aligned boron nitride nano-element arrays and methods for their use and preparation
AssigneeThe Boeing Company
InventorRobert W. Cumberland
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Abstract
Substantially aligned boron nitride nano-element arrays prepared by contacting a carbon nano-element array with a source of boron and nitrogen; methods for preparing such arrays and methods for their use including use as a heat sink or as a thermally conductivity interface in microelectronic devices.
Claims14
A method for producing an array of substantially aligned boron nitride nano-elements, said method comprising:
- growing an array of substantially aligned carbon nano-elements on a substrate;
- forming the substantially aligned boron nitride nano-elements by contacting the array of substantially aligned carbon nano-elements with a precursor gas in a hydrogen gas environment, the precursor gas comprising a source of boron atoms and a source of nitrogen atoms, wherein the source of boron atoms comprises a boron containing compound selected from a group consisting of BH3, B2H4, and B2H6, wherein the array is contacted with the precursor gas for a period of time that facilitates depositing at least a 10 nm coating of boron nitride on the array.
A method for producing an electronic device comprising at least one of a heat-generating component and a heat sink, the method comprising:
- depositing an array of substantially aligned carbon nano-elements on a surface of the heat-generating component or heat sink;
- forming substantially aligned boron nitride nano-elements by contacting the array of substantially aligned carbon nano-elements with a precursor gas in a hydrogen gas environment, the precursor gas comprising a source of boron atoms and a source of nitrogen atoms, wherein the source of boron atoms comprises a boron containing compound selected from a group consisting of BH3, B2H4, and B2H6, wherein the array is contacted with the precursor gas for a period of time that facilitates depositing at least a 10 nm coating of boron nitride on the array.
Dependencies are inferred from the claim text.