Mold for nanoimprinting, its production process, and processes for producing molded resin having fine concavo-convex structure on its surface and wire-grid polarizer

A process for producing a molded resin having a fine concavo-convex structure on its surface, the process comprising:

• a step of forming a layer of a photocurable resin composition on the surface of a support substrate;
• a step of overlaying a mold for nanoimprinting and the support substrate to sandwich the photocurable resin composition between the surface of the mold for nanoimprinting having the fine concavo-convex structure and the surface of the support substrate;
• a step of curing the photocurable resin composition in a state where the photocurable resin composition is sandwiched to form a molded resin having on its surface a fine concavo-convex structure that is reverse of the fine concavo-convex structure on the surface of the mold for nanoimprinting;
• and
• a step of separating the molded resin and the mold for nanoimprinting;
• wherein the mold for nanoimprinting comprises a mold for nanoimprinting having a fine concavo-convex structure on its mold surface, which comprises
• a mold base made of a resin having on its surface a fine concavo-convex structure to be the base of the fine concavo-convex structure,
• a metal oxide layer covering the surface having the fine concavo-convex structure of the mold base, and
• a release layer covering the surface of the metal oxide layer, and
• wherein the method of forming the metal oxide layer is a sputtering method using the metal oxide as a target, and,
• wherein the mold for nanoimprinting is light transmitting.

A process for producing a mold for nanoimprinting, which comprises

• a step of forming a mold base having on its surface a fine concavo-convex structure reverse of the fine concavo-convex structure on the mold surface;
• a step of forming a metal oxide layer on the surface having the concavo-convex structure of the mold base;
• and
• a step of forming a release layer on the surface of the metal oxide layer;
• wherein the method of forming the metal oxide layer is a sputtering method, and
• wherein the mold is light transmitting.

A process for producing an article comprising:

• a step of forming a layer of a photocurable resin composition on the surface of a support substrate;
• a step of overlaying a mold having a fine concavo-convex structure on its mold surface and the support substrate to sandwich the photocurable resin composition between the mold surface of the mold and the surface of the support substrate;
• a step of curing the photocurable resin composition in a state where the photocurable resin composition is sandwiched to form an article base having on its surface a fine concavo-convex structure that is reverse of the fine concavo-convex structure on the mold surface;
• a step of separating the article base and the mold;
• a step of forming a metal oxide layer on the surface having the concavo-convex structure of the article base;
• and
• a step of forming a release layer on the surface of the metal oxide layer, wherein the method of forming the metal oxide layer is a sputtering method using the metal oxide as a target, and
• wherein the article is light transmitting.

A process for producing an article, which comprises

• a step of forming an article base having on its surface a fine concavo-convex structure reverse of the fine concavoconvex structure on the mold surface;
• a step of forming a metal oxide layer on the surface having the concavo-convex structure of the article base;
• and
• a step of forming a release layer on the surface of the metal oxide layer;
• wherein the method of forming the metal oxide layer is a sputtering method, and wherein the article is light transmitting.