Masking method and apparatus
AssigneeIntermolecular, Inc.
InventorPeter Satitpunwaycha
Life of this patent
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Abstract
A chamber for combinatorially processing a substrate is provided. The chamber includes a first mask and a second mask that share a common central axis. The first mask and the second mask are independently rotatable around the common central axis. The first mask has a first plurality of radial apertures and the second mask has a second plurality of radial apertures. An axis of the first plurality of radial apertures is offset from an axis of the second plurality of radial apertures. A substrate support that is operable to support a substrate below the first and second masks is included. The substrate support shares the common central axis.
Claims8
A method for processing a substrate, comprising:
- receiving a substrate onto a stationary substrate support;
- positioning a first mask over and spaced apart from a surface of the substrate, wherein the first mask is characterized by a first central axis, the first mask having a first set of apertures extending through the first mask, wherein the first set of apertures is radially disposed about a first axis parallel to and offset from the first central axis;
- positioning a second mask over a surface of the first mask, wherein the second mask is characterized by a second central axis collinear with the first central axis, the second mask having a second set of apertures extending through the second mask, wherein the second set of apertures is radially disposed about a second axis parallel to and offset from the second central axis;
- processing a first region of the surface of the substrate, the first region defined by one of the first set of apertures and one of the second set of apertures;
- rotating one of the first mask or the second mask around the first or second central axis;
- and
- processing a second region of the substrate, the processing of the second region of the substrate having a varied processing parameter as compared to the processing of the first region;
- wherein the first and second regions are non-overlapping.
Dependencies are inferred from the claim text.