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US 8,709,163 B2Granted
Method of descaling a mask
AssigneeSamsung Display Co., Ltd.
InventorsEui-Gyu Kim, Tae-Hyung Kim
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Abstract
Provided is a method of descaling a mask that quickly and effectively removes a material attached to the mask. The method includes: directing a laser beam onto a material attached to the mask; and removing the material attached to the mask.
Claims12
A method of descaling a deposition mask, the method comprising:
- providing a deposition mask, the deposition mask comprising:
- a pattern comprising an opening, wherein the opening is configured to pass a material there though to be deposited onto a substrate;
- and
- a thin film of the material attached to the deposition mask;
- directing a laser beam with a pulse frequency of about 60 Hz and a pulse strength of about 600 mJ to about 900 mJ onto the material attached to the deposition mask to weaken the bonds between the material and the mask;
- removing the material attached to the mask, comprising:
- immersing the deposition mask in deionized water, wherein immersing comprises directing an ultrasonic wave into the deionized water while the deposition mask is immersed in the deionized water;
- immersing the deposition mask in a liquid organic solvent;
- and
- drying the deposition mask using an air knife.
7 more elements
Dependencies are inferred from the claim text.