Apparatus for measuring thermal diffusivity
AssigneeIndustrial Technology Research Institute
InventorsChih-Chao Shih, Jin-Bao Wu, Ming-Sheng Leu
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Abstract
An apparatus for measuring thermal diffusivity includes a Raman spectroscope, a heating device, and a signal analyzing unit. The Raman spectroscope is utilized to measure a Raman scattering intensity of different sites of a film to be measured. The heating device is utilized to provide a controllable thermal driving wave. The signal analyzing unit is utilized to analyze the Raman scattering intensity from the Raman spectroscope and the thermal driving wave so as to evaluate the thermal diffusivity of the film to be measured.
Claims10
An apparatus for measuring thermal diffusivity, comprising:
- a Raman spectroscope, measuring a Raman scattering intensity of different sites of a film to be measured;
- a heating device, providing a controllable thermal driving wave for the film to be measured;
- and
- a signal analyzing unit, analyzing the Raman scattering intensity from the Raman spectroscope and the thermal driving wave, so as to obtain a thermal diffusivity of the film to be measured.
Dependencies are inferred from the claim text.