Adaptive deformable mirror for compensation of defects of a wavefront
AssigneesFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V., Friedrich-Schiller-Universitaet Jena
InventorsClaudia Bruchmann, Erik Beckert, Thomas Peschel, Christoph Damm, Sylvia Gebhardt
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Abstract
An adaptive mirror that includes a substrate layer, on the first surface of which a reflecting layer and on the second surface of which at least one actuator is disposed. The substrate layer has a thickness of less than or equal to 1,000 μm and the mirror having at least one further metallization for thermal compensation, as a result of which a thermal deformation of the mirror is avoided or preadjusted such that the desired curvature is set as a function of the reflected power.
Claims30
An adaptive mirror having a substrate layer, on the first surface of which a reflecting layer and on the second surface of which at least one actuator is disposed, wherein the substrate layer having a thickness of less than or equal to 1,000 μm and the mirror having at least one further metallization layer that provides thermal compensation, as a result of which a thermal deformation of the mirror is avoided or preadjusted by said metallization layer, wherein the desired curvature of said mirror is a function of the reflected power, said metallization layer comprises metals.
A method for the production of an adaptive mirror, a reflecting layer being applied on a first side of a substrate layer and at least one actuator being applied on a second side of this substrate layer, wherein the substrate layer having a thickness of less than or equal to 1,000 μm and at least one further metallization layer that provides thermal compensation, as a result of which a thermal deformation of the mirror is avoided or preadjusted by said metallization layer, wherein the desired curvature of said mirror is a function of the reflected power, said metallization layer comprises metals.
Dependencies are inferred from the claim text.