Combinatorial processing chamber having electrical contacts
AssigneeIntermolecular, Inc.
InventorsGreg Lim, Gauray Vorma, John Schmidt, Kurt Weiner, Zachary Fresco
Life of this patent
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Abstract
A reactor assembly having a plurality of reaction chambers defined therein is provided. The reactor assembly includes conductive leads that mate with contacts disposed on a substrate being combinatorially processed. The conductive leads may be disposed within walls of the reactor assembly so that one end of the lead mates with the contacts on the substrate or anywhere on the surface of a conductive blanket substrate, while the other end of the lead enables communication with an external monitoring or control device.
Claims27
A multiple chamber system comprising:
- a reaction manifold, the reaction manifold having a top surface and a bottom surface, the reaction manifold having a plurality of through-ways running from the top surface to the bottom surface, each of the plurality of throughways having an open top communicated with the top surface and an open bottom communicated with the bottom surface, the plurality of throughways defining a plurality of reaction chambers when in contact with a substrate, a top surface of the substrate forming a bottom surface for each of the plurality of reaction chambers;
- and
- a plurality of electrically conductive elements, wherein a first end of the plurality of electrically conductive elements protrudes from the top surface of the reaction manifold, wherein at least a portion of the plurality of electrically conductive elements is embedded inside a wall of the reaction manifold, wherein a second end of the plurality of electrically conductive elements protrudes from the bottom surface of the reaction manifold to enable electrical contact with at least one of the substrate and the plurality of reaction chambers.
A tool for processing and analyzing a substrate having site isolated regions, comprising:
- a plurality of reaction chambers each partially defined by at least one chamber wall having a wall thickness, a top surface and a bottom surface, the plurality of reaction chambers having a top opening communicated with the top surface and a bottom opening communicated with the bottom surface, the bottom opening configured to seal against a top surface of the substrate thereby defining an isolated region on the top surface of the substrate, and
- conductive elements, extending along the at least one chamber wall and embedded within the at least one chamber wall to be spaced apart from corresponding reaction chamber, a first end of the conductive elements protruded from the top surface, a second end of the conductive elements extended from the bottom surface to be in electrical communication with corresponding isolated region associated therewith.
A tool for processing and analyzing a substrate having site isolated regions, comprising:
- a plurality of reaction chambers each partially defined by at least one chamber wall having a wall thickness and a top surface, the plurality of reaction chambers having a top opening communicated with the top surface and a bottom opening, the bottom opening configured to seal against a top surface of the substrate thereby defining an isolated region on the top surface of the substrate, and
- conductive elements, extending along the at least one chamber wall and embedded within the at least one chamber wall to be spaced apart from corresponding reaction chamber, a first end of the conductive elements protruded from the top surface, a second end of the conductive elements extended from the chamber wall to be in contact with a fluid in corresponding reaction chambers.
Dependencies are inferred from the claim text.