Substrate treatment system, substrate treatment method, and non-transitory computer storage medium

A substrate treatment method using a substrate treatment system, the substrate treatment system comprising a plurality of treatment apparatuses treating a substrate, a position adjustment apparatus adjusting a center position of the substrate, and a substrate transfer apparatus transferring the substrate to the treatment apparatuses and the position adjustment apparatus,

• the substrate transfer apparatus comprising an arm part curved along a peripheral edge portion of the substrate with a radius of curvature larger than a radius of the substrate, and a holding part projecting inward from the arm part and holding a rear surface of the substrate,
• the position adjustment apparatus comprising a mounting table which holds a central portion of the rear surface of the substrate and is rotatable and horizontally movable,
• said substrate treatment method comprising:
• a position adjustment step of rotating and horizontally moving the mounting table such that the center position of the substrate held on the mounting table is aligned with a center position of the arm part in the position adjustment apparatus;
• and
• a transfer step of then transferring the substrate out of the position adjustment apparatus using the substrate transfer apparatus with the peripheral edge portion of the substrate not in contact with the arm part.