Imprint lithography

A fluid dispenser of an imprint lithography apparatus to eject fluid onto a target area of a lithographic substrate, the dispenser comprising:

• a substrate table configured to hold the lithographic substrate during an imprint process performed by said imprint lithography apparatus;
• a first print head comprising a nozzle arranged to eject imprintable medium onto the target area, the imprintable medium to be imprinted by the imprint lithography apparatus;
• a second print head comprising a nozzle arranged to eject liquid onto the target area;
• and
• a controller arranged to control the second print head to deposit liquid in variable volume droplets onto the target area during deposition of the liquid onto the target area,
• wherein the location of the first and second print heads relative to the target area move generally simultaneously from a first side of the target area to a second side of the target area.

A fluid dispenser of an imprint lithography apparatus to eject fluid onto an area of a lithographic substrate, the dispenser comprising:

• a substrate table configured to hold the lithographic substrate during an imprint process performed by said imprint lithography apparatus;
• a print head comprising a nozzle arranged to eject an imprintable material onto the lithographic substrate, the imprintable medium to be imprinted by the imprint lithography apparatus, wherein the print head is arranged to extend over a distance substantially equal to or greater than the width of the substrate,
• wherein the print head, the substrate table, or both, are arranged to be moveable relative to the other such that a location of the print head relative to the area moves from a first side of the area to a second side of the area while the print head ejects a series of droplets of imprintable material onto the substrate, and
• a controller arranged to control the print head such that a volume of the droplets being ejected as the location of the print head relative to the area moves from the first side of the area to the second side of the area decreases.