Transfer apparatus and transfer method
AssigneeTokyo Electron Limited
InventorsJunnosuke Maki, Mitsuteru Yano, Seiji Nakano, Tsuyoshi Watanabe, Yasunori Toyoda, Suguru Enokida, Naruaki Iida, Hiroki Harada
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AssigneeTokyo Electron Limited
InventorsJunnosuke Maki, Mitsuteru Yano, Seiji Nakano, Tsuyoshi Watanabe, Yasunori Toyoda, Suguru Enokida, Naruaki Iida, Hiroki Harada
Estimating the term…
A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.
A transfer apparatus for mounting and transferring a transferred component on a driven means, said transfer apparatus comprising:
A transfer method of mounting and transferring a transferred component on a driven means, said method comprising:
Dependencies are inferred from the claim text.