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AssigneeKabushiki Kaisha Toyota Chuo Kenkyusho
InventorsTeruhisa Akashi, Yutaka Nonomura, Motohiro Fujiyoshi, Hirofumi Funabashi, Yoshiyuki Hata, Yoshiteru Omura
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A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.
A laminated structure, when three mutually orthogonal axes are defined as an x-axis, a y-axis and a z-axis, a substrate surface is defined as an x-y plane, and an n-spring is defined as a member having a spring constant in a direction of an n-axis that is smaller than spring constants in other directions, where n is one of either x, y or z, comprising:
Dependencies are inferred from the claim text.