Sensor has combined in-plane and parallel-plane configuration

A device comprising a sensor for sensing a magnitude of a physical parameter of an environment of the sensor, wherein:

• the sensor comprises a first electrode, a second electrode and a material between the first and second electrodes;
• the material has an electrical property, whose value depends on the magnitude of the physical parameter;
• the first electrode is formed in a first layer, and the second electrode is formed in a second layer different from the first layer;
• the first layer has a trench and an elevation next to the trench;
• the trench has a bottom wall and a side wall;
• the material is positioned on the bottom wall and on the side wall and on top of the elevation;
• the trench accommodates at least a part of the second electrode;
• and
• the second electrode does not substantially cover the material formed on top of the elevation;
• wherein the material is formed in multiple spatially separated bands across the trench and the elevation.

A device comprising a sensor for sensing a magnitude of a physical parameter of an environment of the sensor, wherein:

• the sensor comprises a first electrode, a second electrode and a material between the first and second electrodes;
• the material has an electrical property, whose value depends on the magnitude of the physical parameter;
• the first electrode is formed in a first layer, and the second electrode is formed in a second layer different from the first layer;
• the first layer has a trench and an elevation next to the trench;
• the trench has a bottom wall and a side wall;
• the material is positioned on the bottom wall and on the side wall and on top of the elevation;
• the trench accommodates at least a part of the second electrode;
• and
• the second electrode does not substantially cover the material formed on top of the elevation;
• wherein the material on top of the elevation has one or more grooves or holes.