Method and system for improving alignment precision of parts in MEMS
AssigneeInternational Business Machines Corporation
InventorsStefano S. Oggioni, Michel Despont, Mark Lantz, Thomas Albrecht
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Abstract
A method and system for improving alignment precision of a pair of MEMS parts. The method involves stacking the two parts such that at least one rolling element is between facing surfaces of said two parts, and each rolling element has a first diameter and an axis of rotation parallel to the facing surfaces. The first and second of a pair of MEMS parts respectively include a first alignment pad and a second alignment pad and a liquid drop formed in contact with both alignment pads can align the two parts which can then be locked together by solidification of solder while remaining spaced by the first diameter.
Claims8
A method for improving alignment precision of two parts of an electronic device, wherein a first part and a second part of said two parts respectively include a first alignment pad and a second alignment pad, said method comprising the steps of,
- stacking said two parts, wherein at least one rolling element is between facing surfaces of said two parts, and each rolling element has a first diameter and an axis of rotation parallel to said facing surfaces,
- maintaining said at least one rolling element on one of said two parts, before aligning said two parts, using at thermally dissipative material that comprises glycerol,
- forming a liquid drop in contact with both said first alignment pad and said second alignment pad to align said two parts and,
- locking said two parts together whereby said two parts remain spaced by said first diameter, said locking achieved by solidification of solder.
Dependencies are inferred from the claim text.