Method for providing side shields for a magnetic recording transducer
AssigneeWestern Digital (Fremont), LLC
InventorsXianzhong Zeng, Hai Sun
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AssigneeWestern Digital (Fremont), LLC
InventorsXianzhong Zeng, Hai Sun
Estimating the term…
A method for fabricating a side shield for a magnetic transducer is described. The magnetic transducer has a nonmagnetic layer and a pole on the nonmagnetic layer. The pole has sidewalls and an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS). A developable bottom antireflective coating (D-BARC) layer covering the pole and at least a portion of the nonmagnetic layer is provided. The D-BARC layer is photosensitive. A photosensitive mask layer is provided on the D-BARC layer. A first portion of the mask layer and a first portion of the D-BARC layer are removed to form a bi-layer mask. The bi-layer mask has an aperture in the mask layer and the D-BARC layer. At least one side shield layer is deposited. At least a portion of the at least one side shield layer resides in the aperture. The bi-layer mask is also removed.
A method for fabricating a side shield for a magnetic transducer having a nonmagnetic layer and a pole on the nonmagnetic layer, the pole having sidewalls and an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS), the method comprising:
A method for fabricating a side shield for a magnetic transducer having a nonmagnetic layer and a pole on the nonmagnetic layer, the pole having sidewalls and an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS), the method comprising:
Dependencies are inferred from the claim text.