Device for generating a plasma discharge for patterning the surface of a substrate

A device for generating a plasma discharge for patterning a surface of a substrate, comprising

• a first electrode having a first discharge portion and a second electrode having a second discharge portion,
• a high voltage source for generating a high voltage difference between the first and the second electrode, and
• one or more position components for positioning the first electrode with respect to the substrate,
• wherein the one or more position components are arranged for selectively positioning the first electrode with respect to the second electrode in a first position in which a distance between the first discharge portion and the second discharge portion is small enough to support the plasma discharge at the high voltage difference, and in a second position in which the distance between the first discharge portion and the second discharge portion is large enough to prevent the plasma discharge at the high voltage difference,
• wherein the device comprises a plurality of first electrodes and one or more second electrodes, and
• wherein the one or more position components are arranged for individually positioning each first electrode with respect to the remaining first electrodes.

A device for generating a plasma discharge for patterning the surface of a substrate, comprising

• a first electrode having a first discharge portion and a second electrode having a second discharge portion,
• a high voltage source for generating a high voltage difference between the first and the second electrode, and
• one or more position components for positioning the first electrode with respect to the substrate,
• wherein the one or more position components are further arranged for positioning the second electrode in synchronism with the first electrode,
• wherein the high voltage source is arranged to in a first mode selectively generate the high voltage difference to support the plasma discharge, and in a second mode generate a decreased voltage difference or zero voltage difference to prevent plasma discharge.

A device for generating a plasma discharge for patterning a surface of a substrate, comprising

• a plurality of first electrodes having a first discharge portion and one or more second electrodes having a second discharge portion,
• a high voltage source for generating a high voltage difference between the first electrodes and the one or more second electrodes, and
• one or more position components for positioning the first electrodes with respect to the substrate,
• wherein the one or more position components are arranged for selectively positioning the first electrodes with respect to the one or more second electrodes in a first position in which a distance between the first discharge portion and the second discharge portion is small enough to support the plasma discharge at the high voltage difference, and in a second position in which the distance between the first discharge portion and the second discharge portion is large enough to prevent the plasma discharge at the high voltage difference,
• wherein the one or more position components are arranged for individually positioning each first electrode with respect to the one or more second electrodes.

A device for generating a plasma discharge for patterning a surface of a substrate, comprising

• a plurality of first electrodes having a first discharge portion and one or more second electrodes having a second discharge portion,
• a high voltage source for generating a high voltage difference between the firsts electrodes and the one or more second electrodes, and
• one or more position components for positioning the first electrodes with respect to the substrate,
• wherein the one or more position components are arranged for selectively positioning the first electrodes with respect to the one or more second electrodes in a first position in which a distance between the first discharge portion and the second discharge portion is small enough to support the plasma discharge at the high voltage difference, and in a second position in which the distance between the first discharge portion and the second discharge portion is large enough to prevent the plasma discharge at the high voltage difference,
• wherein the one or more position components are arranged for individually positioning each first electrode with respect to the remaining first electrodes.