Permanent magnet lens array

A permanent magnetic lens array for charged-particle focusing, comprising:

• a planar volume of a permanent magnetic material, wherein the planar volume of permanent magnetic material includes a plurality of lens openings distributed across a surface of the planar volume of the permanent magnetic material, wherein each of the lens openings of the planar volume of the permanent magnetic material is axially symmetrical and passes from a first surface to a second surface of the planar volume of permanent magnetic material;
• and
• a planar volume of a soft magnetic material, wherein the planar volume of soft magnetic material includes a plurality of lens openings distributed across a surface of the planar volume of the soft magnetic material, wherein each lens opening of the planar volume of soft magnetic material is axially symmetrical and passes from a first surface to a second surface of the planar volume of soft magnetic material, wherein the planar volume of soft magnetic material is operably coupled to a surface of the planar volume of the permanent magnetic material such that at least a portion of the lens openings of the planar volume of permanent magnetic material are substantially aligned with at least a portion of the lens openings of the planar volume of soft magnetic material, wherein the planar volume of permanent magnetic material and the planar volume of soft magnetic material are arranged in a substantially planar monolithic structure, wherein the plurality of lens openings of the volume of permanent magnetic material and the plurality of lens openings of the volume of soft magnetic material are configured to form a plurality of magnetic lenses, wherein each magnetic lens has a magnetic field with at least an axial component oriented substantially perpendicular to the first surface of the planar volume of the permanent magnetic material.