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AssigneeApplied Materials, Inc.
InventorsVijay Sakhare, Sekar Krishnasamy, Mordechai Leska, Donald Foldenauer, Rinat Shimshi, Marvin L. Freeman, Jeffery Hudgens, Satish Sundar
Estimating the term…
Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.
A machine-accessible medium including data that, when accessed by a machine, cause the machine to perform a method comprising:
A method, comprising:
An apparatus, comprising:
Dependencies are inferred from the claim text.