Light-transmitting metal electrode and process for production thereof
AssigneeKabushiki Kaisha Toshiba
InventorsEishi Tsutsumi, Tsutomu Nakanishi, Akira Fujimoto, Koji Asakawa
Life of this patent
Estimating the term…
Abstract
The present invention provides a light-transmitting metal electrode including a substrate and a metal electrode layer having plural openings. The metal electrode layer also has such a continuous metal part that any pair of point-positions in the part is continuously connected without breaks. The openings in the metal electrode layer are periodically arranged to form plural microdomains. The plural microdomains are so placed that the in-plane arranging directions thereof are oriented independently of each other. The thickness of the metal electrode layer is in the range of 10 to 200 nm.
Claims10
A light-transmitting metal electrode comprising:
- a substrate;
- and
- a metal electrode layer having a thickness of 10 to 200 nm and formed on the substrate, the metal electrode layer comprising:
- a continuous metal part, any two points in the continuous metal part being continuously connected without breaks;
- and
- a plurality of openings penetrating through the metal electrode layer and being arranged so that a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm.
A light-transmitting metal electrode comprising a metal electrode layer having a thickness of 10 to 200 nm, wherein
- the metal electrode layer comprises:
- a continuous metal part, any two points in the continuous metal part being continuously connected without breaks;
- and
- a plurality of openings penetrating through the metal electrode layer and being arranged so that a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm.
A light-transmitting metal electrode a substrate;
- a metal electrode layer having a thickness of 10 to 200 nm and formed on the substrate, the metal electrode layer including a plurality of microdomains neighboring each other;
- and grain boundaries bordering each of the plurality of microdomains, wherein each microdomain comprises:
- a continuous metal part, any two points in the continuous metal part being continuously connected without breaks;
- and a plurality of openings penetrating through the metal electrode layer and being arranged periodically along an arranging direction;
- wherein the arranging directions of two neighboring microdomains are different from each other.
A light-transmitting metal electrode, comprising:
- a substrate;
- and
- a metal electrode layer having a thickness of 10 to 200 nm and formed on the substrate, the metal electrode layer including a plurality of microdomains neighboring each other,
- wherein each microdomain comprises:
- a continuous metal part, any two points in the continuous metal part being continuously connected without breaks;
- and
- a plurality of openings penetrating through the metal electrode layer and being arranged periodically along an arranging direction;
- wherein the arranging directions of two neighboring microdomains are different from each other;
- and
- wherein a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm.
Dependencies are inferred from the claim text.