Piezoelectric micro-blower
AssigneeMurata Manufacturing Co., Ltd.
InventorsAtsuhiko Hirata, Gaku Kamitani, Hiroaki Wada, Midori Sunaga, Shungo Kanai
Life of this patent
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Abstract
A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall.
Claims11
A piezoelectric micro-blower comprising:
- a blower body;
- a diaphragm secured to the blower body at a perimeter thereof and including a piezoelectric element;
- a first wall attached to the blower body and positioned so as to define a blower chamber between the diaphragm and the first wall, the first wall including a first opening facing a center of the diaphragm, the first opening being in fluid communication with the blower chamber;
- a second wall spaced from the first wall and disposed opposite the blower chamber with the first wall interposed between the second wall and the blower chamber, the second wall including a second opening facing the first opening;
- and
- an inflow path disposed between the first wall and the second wall, the inflow path including outer ends communicating with the outside of the piezoelectric micro-blower and inner ends connected to the first opening and the second opening;
- and
- a center space disposed at the inner ends of the inflow path and having an opening area greater than an opening area of the first opening and an opening area of the second opening;
- wherein
- the opening area of the center space is dimensioned such that a portion of the first wall facing the center space resonates in response to displacement of the diaphragm;
- and
- the first wall does not include any piezoelectric elements.
Dependencies are inferred from the claim text.