Installation fixture for elastomer bands and methods of using the same
AssigneeLam Research Corporation
InventorNeal Newton
Life of this patent
Estimating the term…
Abstract
A method of installing an elastomer band as a protective edge seal around a portion of a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, which includes expanding an elastomer band into a circular shape having a diameter greater than a diameter of a mounting groove within the substrate support; clamping the elastomer band in the expanded shape between a base ring and a clamp ring; placing the elastomer band over the substrate support in the expanded shape; and releasing the elastomer band from between the base and clamp rings, which contracts the elastomer band into the mounting groove of the substrate support.
Claims14
An annular installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber comprising:
- an installation unit comprising:
- a top ring, the top ring having one or more internal threads;
- a clamp ring;
- a base ring, the base ring having one or more external threads, which are configured to receive the one or more internal threads of the top ring, and upon tightening of the top ring onto the base ring, the elastomer band is clamped between the clamp ring and the base ring;
- and
- a latch and release mechanism, which releases the elastomer band into the mounting groove by un-clamping the elastomer band from between the clamp ring and the base ring;
- and
- a loading member, which positions the elastomer band within the installation unit between the clamp ring and the base ring.
An elastomer band installation kit comprising:
- an annular installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support comprising:
- an installation unit comprising:
- a top ring, the top ring having one or more internal threads;
- a clamp ring;
- a base ring, the base ring having one or more external threads, which are configured to receive the one or more internal threads of the top ring, and upon tightening of the top ring onto the base ring, the elastomer band is clamped between the clamp ring and the base ring;
- and
- a latch and release mechanism, which releases the elastomer band into the mounting groove by un-clamping the elastomer band from between the clamp ring and the base ring;
- and
- a loading member, which positions the elastomer band within the installation unit between the clamp ring and the base ring;
- and
- a curved embedding tool adapted to press the elastomer band into the mounting groove in the substrate support, the tool comprising a curved surface that is curved in a concave manner, and has a radially extending portion, which pushes the elastomer band into the mounting groove.
Dependencies are inferred from the claim text.