Construction element that operates with acoustic waves, and method for the manufacture thereof
AssigneeEpcos AG
InventorsWerner Ruile, Markus Hauser, Ingo Bleyl, Gerd Riha
Life of this patent
Estimating the term…
Abstract
A component that operates with acoustic waves includes a substrate including a piezoelectric material, a first electrode plane in which bottom electrode structures including an acoustically active bottom electrode are arranged directly on the substrate, and a top electrode arranged above the bottom electrode plane and which is electrically conductively connected to the bottom electrode structures, wherein excitation of the acoustic waves during operation of the component is effected exclusively or predominantly through the bottom electrode structures.
Claims19
A component that operates with acoustic waves comprising:
- a substrate comprising a piezoelectric material;
- a first electrode plane in which bottom electrode structures comprising an acoustically active bottom electrode are arranged directly on the substrate;
- and
- a to electrode arranged above the bottom electrode plane and which is electrically conductively connected to the bottom electrode structures, and
- a busbar electrically conductively connected to the top electrode,
- wherein excitation of the acoustic waves during operation of the component is effected exclusively or predominantly through the bottom electrode structures, the top electrode electrically conductively connects the bottom electrode structures to the busbar and the acoustically active bottom electrode is not connected directly to the busbar.
Dependencies are inferred from the claim text.