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AssigneeTokyo Electron Limited
InventorsToshihiko Nishida, Kazuyoshi Eshima, Hisakazu Nakayama
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Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by transmission of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heater radiating light; a cylindrical member made of material transmitting the radiated light and having a cylindrical shape in which the lamp heater is able to be inserted and penetrated into an internal space thereof; a liquid pipe placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein using the radiated light; a reflection plate that covers the liquid pipe from the outside and reflects the radiated light; and a first temperature sensor attached to an outer surface of the reflection plate.
A liquid heating unit, comprising:
A liquid processing method using a liquid heating unit that includes a lamp heater configured to radiate light, a cylindrical member made of material transmitting the light and having a cylindrical shape in which the lamp heater is able to be inserted and penetrated into an internal space thereof, a liquid pipe placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein using the radiated light, a reflection plate configured to cover the liquid pipe from the outside and reflect the radiated light, and a first temperature sensor attached to an outer surface of the reflection plate, the method comprising:
Dependencies are inferred from the claim text.