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US 8,670,213 B1Granted
Methods for tunable plating seed step coverage
AssigneeWestern Digital (Fremont), LLC
InventorsWanxue Zeng, Weimin Si, Ying Hong, Zhigang Bai
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Abstract
A writer main pole for a perpendicular magnetic recording system is provided. The writer pole has a tunable bottom gap to side gap ratio, and may be formed using deposition of a first seed layer through an ion beam deposition process, deposition of a second seed layer through a physical vapor deposition process, and deposition of a non-magnetic gap layer through a chemical vapor deposition process.
Claims13
A method, comprising:
- ion beam depositing a seed layer over the bottom and sides of a trench formed in an insulating material over a substrate,
- the ion beam depositing using a predetermined ion beam deposition angle such that the seed layer has a different thickness over the bottom of the trench than over the sides of the trench;
- chemical vapor depositing a non-magnetic gap layer over the seed layer;
- and
- physical vapor depositing a second seed layer on the first seed layer;
- wherein the non-magnetic gap layer is deposited on the second seed layer.
3 more elements
A method, comprising:
- ion beam depositing a seed layer over the bottom and sides of a trench formed in an insulating material over a substrate,
- the ion beam depositing using a predetermined ion beam deposition angle such that the seed layer has a different thickness over the bottom of the trench than over the sides of the trench;
- and
- chemical vapor depositing a non-magnetic gap layer over the seed layer;
- wherein the predetermined ion beam deposition angle is configured to provide a predetermined ratio of bottom gap thickness to side gap thickness.
2 more elements
A perpendicular magnetic recording writer main pole created by a process, the process comprising:
- ion beam depositing a first seed layer over the bottom and sides of a trench formed in an insulating material over a substrate,
- the ion beam depositing using a predetermined ion beam deposition angle such that the seed layer has a different thickness over the bottom of the trench than over the sides of the trench;
- physical vapor depositing a second seed layer on the first seed layer;
- and
- chemical vapor depositing a non-magnetic gap layer on the second seed layer.
2 more elements
Dependencies are inferred from the claim text.