Resonator
AssigneeNXP B.V.
InventorRobert J. P. Lander
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Abstract
A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator. The method includes the steps of forming the resonator from the first material; applying the second material to the resonator; and controlling the quantity of the second material applied to the resonator by the geometry of the resonator.
Claims19
A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, the method comprising the steps of:
- forming the resonator from the first material, the resonator having a resonant frequency and including:
- a spring having first and second ends and an elongated portion of the first material therebetween, the first end connected to an anchor of the MEMS resonator, and
- a rigid mass region attached to the second end of the spring;
- creating a 3-dimensional space within the first material of the rigid mass region, within which the second material may be applied;
- and
- applying the second material to the resonator, a quantity of the second material being controlled by a geometry of the 3-dimensional space in the resonator, including desensitizing the resonant frequency to spring dimensions and oxide thickness.
A resonator comprising:
- a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus;
- a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator;
- a beam region including the first material;
- and
- a rigid mass region including the first material, wherein the beam region is configured and arranged as a spring having a first end coupled to the mass region and a second end coupled to an anchor of the resonator, the resonator having a resonant frequency, and the mass region includes a controller configured and arranged to control an amount of the second material in the mass region by containing at least a portion of the second material to a limited-3-dimensional space formed within the first material of the mass region and including desensitizing the resonant frequency to spring dimensions and oxide thickness.
Dependencies are inferred from the claim text.