Methods and apparatus for smart abatement using an improved fuel circuit
AssigneeApplied Materials, Inc.
InventorsHo-Man Rodney Chiu, Daniel O. Clark, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen
Life of this patent
Estimating the term…
Abstract
A method for abating effluent from an electronic device manufacturing process is provided, including abating the effluent in a thermal abatement tool to form abated effluent; determining whether the abated effluent contains one or more chemical species of interest; and changing one or more operating parameters of the thermal abatement tool based upon the determination. Numerous other embodiments are provided.
Claims12
A system for abating effluent from an electronic device manufacturing process comprising:
- a thermal abatement tool, including a thermal abatement reactor, configured to abate the effluent and to form abated effluent;
- a fuel supply coupled to the thermal abatement reactor and configured to supply a fuel thereto;
- an oxidant supply coupled to the thermal abatement reactor and configured to provide a controllable supply of an oxidant thereto;
- a sensor configured to determine whether the abated effluent contains one or more chemical species of interest;
- and
- a controller configured to receive a signal from the sensor and coupled to at least one pump, valve, or regulator for controlling at least one of the fuel supply, the oxidant supply, and at least one inlet to the thermal abatement reactor;
- wherein:
- the signal indicates whether the abated effluent contains the one or more chemical species of interest;
- and
- the controller is further configured to change one or more operating parameters of the thermal abatement tool through operation of the at least one pump, valve, or regulator based upon the signal, wherein the one or more operating parameters comprise at least one of fuel flow, fuel composition, reagent flow, reagent composition, coolant flow, oxidant flow, and abatement reaction temperature.
A system for abating effluent from an electronic device manufacturing process comprising:
- a thermal abatement tool, including a thermal abatement reactor, configured to abate an effluent and to form abated effluent;
- a sensor configured to determine whether the abated effluent contains one or more chemical species of interest;
- and
- a controller configured to receive a signal from the sensor and coupled to at least one pump, valve, or supply of electrical energy for controlling operation of the thermal abatement tool;
- wherein:
- the signal indicates whether the abated effluent contains the one or more chemical species of interest;
- and
- the controller is further configured to change one or more operating parameters of the thermal abatement tool through operation of the at least one pump, valve, or supply of electrical energy based upon the signal, wherein the one or more operating parameters comprise at least one of fuel flow, fuel composition, reagent flow, reagent composition, coolant flow, oxidant flow, an amount of electrical energy, and abatement reaction temperature.
Dependencies are inferred from the claim text.