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US 8,668,768 B2Granted
System for preventing contaminants from reaching a gas purifier
AssigneePraxair Technology, Inc.
InventorsThomas Robert Schulte, Michael Henry Hawke, Keith Randall Pace, Thomas John Bergman, Jr., Brian Donald Warrick, Sandro DiSanto, Rick Boyer
Life of this patent
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Abstract
The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.
Claims8
A contaminant gas detection apparatus for protecting a downstream gas purifier from damage, comprising:
- a gas analyzer disposed upstream of a buffer vessel, the gas analyzer configured to detect a contaminant concentration of hydrogen, oxygen and carbon monoxide in a conventional purity gas stream, the gas analyzer comprising a detection response time for detecting the contaminant concentration;
- and
- the buffer vessel downstream and in fluid communication with the gas analyzer, the buffer vessel comprising a buffer volume sufficient to hold up a predetermined volume of a conventional purity gas stream prior to routing the conventional purity gas stream to the gas purifier, the buffer vessel configured for holding up the predetermined volume of the conventional purity gas stream for at least a time equal to the detection response time of the analyzer to allow the gas analyzer to determine if the contaminant in the conventional purity gas stream exceeds a predetermined level;
- wherein the gas analyzer and the buffer vessel are in fluid communication with each other to isolate and contain the conventional purity gas stream if the contaminant concentration exceeds the predetermined level.
1 more element
Dependencies are inferred from the claim text.