Apparatus for producing trichlorosilane and method for producing trichlorosilane

An apparatus for producing trichlorosilane from a raw gas that includes silicon tetrachloride and hydrogen, comprising:

• a reaction vessel that has a substantially cylindrical wall body, a top plate that closes an upper opening formed by the wall body, and a bottom plate that closes a lower opening formed by the wall body, where a reaction product gas is produced from the raw gas supplied through a gas introducing passage provided to the lower section of the cylindrical wall body;
• and
• a plurality of heaters that are disposed inside the reaction vessel to heat the raw gas,
• wherein each of the heaters has a heating element that is elongated in vertical direction and generates heat upon electrification, and a mount that is fixed to the bottom plate and supports the heating element;
• a flange is provided to an intermediate height of the heating element such that the flange is arranged to a position higher than the gas introducing passage and is elongated in horizontal direction;
• and
• a passage of the raw gas formed between adjacent heaters is narrowed by the flange.