Back to results
US 8,656,735 B2Granted
Method for treating surface of oxide glass with fluorinating agent
AssigneeAsahi Glass Company, Limited
InventorsChikaya Tamitsuji, Kunio Watanabe
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeAsahi Glass Company, Limited
InventorsChikaya Tamitsuji, Kunio Watanabe
Estimating the term…
To provide a novel fluorination treatment method whereby the surface of oxide glass can be treated for fluorination at low cost and with excellent adhesiveness. A method for treating the surface of oxide glass, which comprises contacting the surface of oxide glass with a gas of a fluorinating agent or a mixed gas having a fluorinating agent diluted with an inert gas, wherein the fluorinating agent is an elemental fluorine, or a fluorine compound capable of cleaving a bond between an oxygen atom and a metal atom in the framework of the oxide glass and forming a bond between a fluorine atom and the metal atom; and the concentration of hydrogen fluoride at the surface of oxide glass with which the fluorinating agent is in contact, is controlled to be at most 1 mol %.
The method for treating the surface of oxide glass comprising contacting the surface of oxide glass with a mixed gas comprising elemental fluorine as a fluorinating agent diluted with an inert gas, wherein a dew point of said inert gas is at most −10° C., wherein a concentration of hydrogen fluoride at the surface of oxide glass with which said mixed gas is in contact, is controlled to be at most 1 mol% by carrying out the procedure of contacting the surface of oxide glass with said mixed gas, in a closed container containing said mixed gas and a solid metal fluoride, wherein a temperature of said mixed gas is within a range of from −50 to 300° C.
The method for treating the surface of oxide glass comprising contacting the surface of oxide glass with or a mixed gas comprising elemental fluorine as a fluorinating agent diluted with an inert gas, wherein a dew point of said inert gas is at most −10° C., wherein a concentration of hydrogen fluoride at the surface of oxide glass with which said mixed gas is in contact, is controlled to be at most 1 mol % by carrying out a procedure of contacting the surface of oxide glass with said mixed gas in a gas phase by setting the oxide glass in a pipe line in which said mixed gas continuously flows,
Dependencies are inferred from the claim text.