Method of fabricating an electromechanical component using graphene
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsJean-Christophe Gabriel, Philippe Andreucci, Thomas Ernst, Thierry Poiroux
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Abstract
Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of: a) formation, inside a layer of at least one given material resting on a support, of at least one bar, b) formation around the bar of at least one first graphene sheet, and of a least one second graphene sheet, separated from the first sheet and mobile with respect to the first sheet.
Claims13
A method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of:
- a) forming in a layer of at least one given material resting on a support at least one bar, and b) forming around the bar a plurality of sheets of graphene of which at least a first graphene sheet, and at least one second graphene sheet, separated from the first sheet and mobile with respect to the first sheet.
Dependencies are inferred from the claim text.