Ion beam sample preparation apparatus and methods
AssigneeGatan, Inc.
InventorsSteven Thomas Coyle, John Andrew Hunt
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AssigneeGatan, Inc.
InventorsSteven Thomas Coyle, John Andrew Hunt
Estimating the term…
Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. Additionally, apparatus kits are disclosed that enable the use of the same shields in the observation of prepared samples.
An ion beam sample preparation apparatus comprising:
An ion beam sample preparation apparatus comprising:
The apparatus of claim one wherein at least a portion of the first shielding surface is made of tantalum or titanium.
A kit for preparing a sample in an ion beam sample preparation device using a broad ion beam, said kit comprising:
A kit for observing in a microscope a sample prepared in an ion beam sample preparation device using a broad ion beam, said kit comprising:
Dependencies are inferred from the claim text.