Integrated gripper for workpiece transfer
AssigneesDynamic Micro System, Semiconductor Equipment GmbH
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
An integrated grip arm for transfer reticles and carrier boxes is disclosed for improving throughput, yield and reliability of transport equipment. The integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can further comprise sensor or means to select the right gripper for the right reticles or carrier boxes.
Claims18
An integrated handler for picking and placing at least an object comprising two opposite straight sides, the integrated handler comprising
- a first gripper handler;
- a second gripper handler,
- wherein the second gripper handler is operable to approach the object from one direction for handling the object,
- wherein the second gripper handler comprises two fork elements,
- wherein each fork element comprises a top section and a bottom section,
- wherein the top section and the bottom section are operable to support the object with the object disposed between the top section and the bottom section,
- wherein the two fork elements are configured to be disposed at two extreme edges of the object along the two opposite straight sides of the object.
An integrated handler for picking and placing at least an object, comprising
- an edge gripper handler,
- wherein the edge gripper handler comprises two movable arms,
- wherein the movable arms are operable to approach the object from two directions for gripping the object,
- wherein each movable arm comprises a gripper element,
- wherein the gripper element comprises a top component and a bottom component,
- wherein the top component and the bottom component are operable to support the object with the object disposed between the top component and the bottom component;
- a fork gripper handler,
- wherein the fork gripper handler is operable to approach the object from one direction for gripping the object,
- wherein the fork gripper handler comprises two fork elements,
- wherein each fork element comprises a top section and a bottom section,
- wherein the top section and the bottom section are operable to handle the object with the object disposed between the top section and the bottom section.
A system comprising
- a first station, wherein the first station is operable to support a first type of objects;
- a second station, wherein the second station is operable to support a second type of objects,
- wherein the first type of objects is configured to be handled by an arm approaching the objects from two directions,
- wherein the second type of objects is configured to be handled by an arm approaching the objects from one direction;
- a robot arm,
- wherein the robot arm comprises an edge gripper handler and a fork gripper handler,
- wherein the edge gripper handler comprises two movable arms,
- wherein the movable arms are operable to approach an object from two directions for gripping the object,
- wherein each movable arm comprises a gripper element,
- wherein the gripper element comprises a top component and a bottom component,
- wherein the top component and the bottom component are operable to support the object with the object disposed between the top component and the bottom component,
- wherein the fork gripper handler is operable to approach an object from one direction for gripping the object,
- wherein the fork gripper handler comprises two fork elements,
- wherein each fork element comprises a top section and a bottom section,
- wherein the top section and the bottom section are operable to handle the object with the object disposed between the top section and the bottom section.
Dependencies are inferred from the claim text.