Electrostatically coupled pressure sensor
AssigneePGS Geophysical AS
InventorsFrederick James Barr, Stig Rune Lennart Tenghamn, Anders Göran Mattsson
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Abstract
A disclosed pressure-responsive sensor includes a flexible element contained within an enclosure and a membrane configured to exert an electrostatic force on the flexible element to cause the flexible element to respond to pressure variations on the membrane. A disclosed pressure-sensing method includes electrostatically coupling a membrane to a flexible element contained within an enclosure to transfer a pressure response of the membrane to the flexible element. Motion of the flexible element is converted into a pressure signal.
Claims20
A sensor comprising:
- a housing having at least one wall;
- a cantilever element disposed within the housing, wherein a first end of the cantilever element is affixed to the at least one wall, and wherein a portion of the cantilever element is coupled to an output portion of the sensor;
- and
- a membrane configured to exert an electrostatic force on the cantilever element to cause the cantilever element to move in response to pressure exerted on the membrane.
A method, comprising:
- towing a geophysical survey system that includes one or more sensors behind a vessel in a body of water, wherein at least one of the one or more sensors includes a cantilever member and a flexible membrane;
- the flexible membrane receiving an external force;
- in response to the received external force, the flexible membrane exerting an electrostatic force on the cantilever member;
- the cantilever member departing from an equilibrium position;
- and
- the at least one sensor outputting a signal indicative of a motion of the cantilever member.
An apparatus, comprising:
- a seismic streamer cable having a first sensor that includes:
- a sensing element and an output element;
- wherein the sensing element includes a cantilever member and a membrane, wherein the membrane is configured, in response to a force exerted on the membrane, to cause a change in position of the cantilever member, wherein the change in position is indicative of an electrostatic force exerted by the membrane on the cantilever member;
- and
- wherein the output element is configured to output a signal indicative of the force.
Dependencies are inferred from the claim text.