Burner and method for the manufacture of synthetic quartz glass
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHisatoshi Otsuka, Kazuo Shirota
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHisatoshi Otsuka, Kazuo Shirota
Estimating the term…
A method for manufacturing quartz glass using a main burner having a multi-tube assembly having a center tube, a first enclosure tube surrounding the center tube, a second enclosure tube surrounding the first enclosure tube, a tubular shell surrounding the multi-tube assembly, and a plurality of nozzles disposed within the tubular shell, a double-tube assembly surrounding at least a forward opening of the main burner includes feeding silica-forming compound to the center tube, a combustion-supporting gas to the first enclosure tube and the nozzles, a combustible gas to the second enclosure tube and the tubular shell, and a combustion-supporting gas to the double-tube assembly, forming oxyhydrogen flame for hydrolyzing or decomposing the silica-forming compound to form silica, depositing the silica on the target, and melting and vitrifying the deposited silica into quartz glass.
A method for the manufacture of a synthetic quartz glass ingot using a burner comprising a main burner comprising a multi-tube assembly of a three or more tube construction including a center tube, a first enclosure tube surrounding the center tube, and a second enclosure tube surrounding the first enclosure tube, a tubular shell surrounding the multi-tube assembly, and a plurality of nozzles disposed within the tubular shell, the main burner defining a forward opening, and a double-tube assembly surrounding at least the forward opening of the main burner;
Dependencies are inferred from the claim text.