Method for making semi-conductor nanocrystals
AssigneesCommissariat A L'energie Atomique Et Aux Energies Alternatives, Centre National De La Recherche Scientifique
InventorsLukasz Borowik, Jean-Charles Barbe, Ezra Bussmann, Fabien Cheynis, Frederic Leroy, Denis Mariolle, Pierre Muller
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Abstract
A method for making semi-conductor nanocrystals, including at least the steps of: forming solid carbon chemical species on a semi-conductor thin layer provided on at least one dielectric layer, the dimensions and the density of the carbon chemical species formed on the semi-conductor thin layer being a function of the desired dimensions and density of the semi-conductor nanocrystals; annealing the semi-conductor thin layer, performing a dewetting of the semi-conductor and forming, on the dielectric layer, the semi-conductor nanocrystals.
Claims11
A method for making semi-conductor nanocrystals, including at least the steps of:
- forming and controlling a density of solid carbon chemical species on a semi-conductor thin layer provided on at least one dielectric layer;
- annealing the semi-conductor thin layer to perform a dewetting of the semi-conductor and forming, on the dielectric layer, the semi-conductor nanocrystals,
- wherein the desired dimensions and density of the semi-conductor nanocrystals are controlled by the density of the carbon chemical species formed on the semi-conductor thin layer.
Dependencies are inferred from the claim text.