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US 8,646,879 B2Granted
Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsHiromu Miyazawa, Takayuki Yonemura, Koichi Morozumi, Tomohiro Sakai
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Abstract
A piezoelectric element comprises a piezoelectric layer and an electrode which is provided with the piezoelectric layer. The piezoelectric layer comprises a complex oxide which has a perovskite structure including bismuth, iron, a first dopant element which is at least one type selected from a group formed from sodium, potassium, calcium, and strontium, and a second dopant element which is at least one type selected from a group formed from manganese, titanium, vanadium, niobium, and tin.
Claims4
A piezoelectric element comprising:
- a piezoelectric layer;
- and
- an electrode which is provided with the piezoelectric layer,
- wherein the piezoelectric layer comprises a complex oxide which has a perovskite structure including:
- bismuth;
- iron;
- a first dopant element which is at least one type selected from a group formed from sodium, potassium, calcium, and strontium;
- and
- a second dopant element which is at least one type selected from a group formed from manganese, titanium, vanadium, niobium, and tin,
- wherein the bismuth and the first dopant element are included in an A site and the iron and the second dopant element are included in a B site,
- wherein the complex oxide has a deficiency in the A sites of the perovskite structure and has bismuth in the B sites.
8 more elements
Dependencies are inferred from the claim text.