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US 8,638,179 B2Granted
Micromechanical resonating devices and related methods
AssigneeSand 9, Inc.
InventorsAlexei Gaidarzhy, Pritiraj Mohanty
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Abstract
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. A bias structure separated from the mechanical resonating structure is provided to tune a resonance frequency of the mechanical resonating structure.
Claims2
An apparatus, comprising:
- a suspended mechanical resonating structure;
- and
- a bias structure disposed proximate a first side of the suspended mechanical resonating structure and separated from the suspended mechanical resonating structure by a first gap,
- wherein the bias structure is configured to tune a resonance frequency of the suspended mechanical resonating structure by applying a bias to the suspended mechanical resonating structure,
- wherein the bias structure comprises a comb structure, and
- wherein the comb structure comprises a first, movable portion and a second, stationary portion.
3 more elements
Dependencies are inferred from the claim text.