Broadband reflective waveguide metal gratings and their formation
AssigneeWestern Digital (Fremont), LLC
InventorsZhong Shi, Hongxing Yuan, Shing Lee, Zhongyan Wang, Ge Yi
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Abstract
Devices having reflective grating structures and methods of fabricating the same are disclosed. A bottom clad layer is disposed above a substrate. A waveguide core layer is disposed above the bottom clad layer. A top clad layer is disposed above the waveguide core layer. At least one metal grating structure is disposed adjacent to an interface between the waveguide core layer and one of the bottom clad layer and the top clad layer, where the at least one metal grating structure is configured to reflect at least a portion of an incident electromagnetic radiation coupled into the waveguide core layer.
Claims33
A device having a reflective grating structure, comprising:
- a substrate;
- a bottom clad layer on the substrate;
- a waveguide core layer on the bottom clad layer;
- a top clad layer on the waveguide core layer;
- at least one metal grating structure disposed adjacent to an interface between the waveguide core layer and one of the bottom clad layer and the top clad layer, the at least one metal grating structure configured to reflect at least a portion of an incident electromagnetic (EM) radiation coupled into the waveguide core layer;
- and
- a reflective layer spaced apart from the waveguide core layer such that one of the bottom clad layer and the top clad layer is disposed between the reflective layer and the waveguide core layer, the reflective layer configured to cause an uncoupled portion of an EM radiation traveling away from the waveguide core layer to reflect back toward the waveguide core layer,
- wherein a material of the at least one metal grating is different from a material of the bottom clad layer;
- and
- wherein a material of the at least one metal grating is different from a material of the top clad layer.
A method of reflecting an incident electromagnetic (EM) radiation, the method comprising:
- providing a waveguide structure comprising:
- a bottom clad layer;
- a waveguide core layer on the bottom clad layer;
- a top clad layer on the waveguide core layer;
- a reflective layer spaced apart from the waveguide core layer such that one of the bottom clad layer and the top clad layer is disposed between the reflective layer and the waveguide core layer;
- and
- at least one metal grating structure disposed adjacent to the waveguide core layer;
- coupling an EM radiation into the waveguide core layer;
- and
- reflecting at least a portion of the coupled EM radiation using the at least one metal grating structure,
- wherein a material of the at least one metal grating is different from a material of the bottom clad layer;
- and
- wherein a material of the at least one metal grating is different from a material of the top clad layer.
Dependencies are inferred from the claim text.