Electrical-mechanical complex sensor for nanomaterials
AssigneeKorea Research Institute of Standards and Science
InventorsSeung Hoon Nahm, Hoon Sik Jang, Sang Gu Jeon, Min Seok Kim
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Abstract
Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector.
Claims4
An electrical-mechanical complex sensor for nanomaterials, comprising:
- a detector (20) having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial (35) when a bending or tensile load is applied to the nanomaterial (35);
- a first detection film (21a) formed at an end of the detector (20) to measure the mechanical property and an electrical property of the nanomaterial (35) in real time at the same time, when the nanomaterial (35) contacts the first detection film (21a);
- and
- a support (10) to which one end of the detector (20) is integrally connected, for supporting the detector (20),
- wherein the support (10) comprises first to fourth electrodes (11 to 14) constituting a Wheatstone bridge circuit to measure the load applied to the nanomaterial (35), and a fifth electrode (15) having a second detection film (21b) at an end thereof to be connected to a first detection film (21a), for measuring an electrical property of the nanomaterial (35).
Dependencies are inferred from the claim text.