Cantilever for magnetic force microscope and method of manufacturing the same
AssigneeHitachi High-Technologies Corporation
InventorsKaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Tetsuya Matsui, Tsuneo Nakagomi, Teruaki Tokutomi
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Abstract
In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
Claims11
A cantilever for a magnetic force microscope to be used in measurement by a magnetic force microscope, the cantilever comprising:
- a magnetic film applied to a probe at a tip of the cantilever for the magnetic force microscope;
- and
- a non-magnetic rigid protective film applied around the probe,
- wherein the magnetic film is applied to one side of the probe.
A cantilever for a magnetic force microscope to be used in measurement by a magnetic force microscope, the cantilever comprising:
- a magnetic film provided to a probe at a tip of the cantilever for the magnetic force microscope;
- and
- an anti-oxidant protective film for a soft magnetic substance applied around the probe,
- wherein the magnetic film is applied to one side of the probe.
A method of manufacturing a cantilever for a magnetic force microscope to be used in measurement by a magnetic force microscope, the method comprising the steps of:
- forming a magnetic film on a probe at a tip of the cantilever for the magnetic force microscope;
- and
- forming a non-magnetic rigid protective film around the probe,
- wherein,
- when the non-magnetic rigid protective film is formed around the probe of the cantilever for the magnetic force microscope, the non-magnetic rigid protective film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
A method of manufacturing a cantilever for a magnetic force microscope to be used in measurement by the magnetic force microscope, wherein
- a probe at a tip of the cantilever for the magnetic force microscope is a CNF probe or a CNT probe, and,
- when a magnetic film is formed on the CNF probe or the CNT probe, a distance between a film-forming target of the magnetic film and the CNF probe or the CNT probe is long, and, when a non-magnetic rigid protective film is formed around the CNF probe or the CNT probe, a distance between a film-forming target of the non-magnetic rigid protective film and the CNF probe or the CNT probe is short.
A method of manufacturing a cantilever for a magnetic force microscope to be used in measurement by a magnetic force microscope, the method comprising the steps of:
- forming a magnetic film on a probe at a tip of the cantilever for the magnetic force microscope;
- and
- forming an anti-oxidant protective film for a soft magnetic substance around the probe,
- wherein the magnetic film is applied to one side of the probe.
A method of manufacturing a cantilever for a magnetic force microscope to be used in measurement by a magnetic force microscope, the method comprising the steps of:
- forming a magnetic film on a probe at a tip of the cantilever for the magnetic force microscope;
- forming a non-magnetic rigid protective film around the probe;
- and
- applying the magnetic film to one side of the probe.
Dependencies are inferred from the claim text.