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US 8,621,402 B2Granted
Model-based fill
AssigneeMentor Graphics Corporation
InventorsShohdy Abd Elkader, Craig M. Larsen
Life of this patent
Estimating the term…
Abstract
Various aspects of this disclosure relate to increasing pattern density in a circuit layout design of a circuit layer so as to control the thickness of material in a manufactured integrated circuit. For example, a layer in circuit design may be divided into separate areas, and a target thickness range may be established for all of the tiles in the integrated circuit design. Each area may be analyzed to determine if it has a sufficient pattern density for a thickness estimation model to accurately estimate its expected material thickness upon manufacture. Each tile may be analyzed to determine if the expected thickness for that tile is within the target thickness range.
Claims18
A method, comprising:
- identifying a target thickness for a portion of an integrated circuit design;
- identifying at least one criterion for use in controlling addition of geometric elements to the portion of the integrated circuit design;
- selecting a first potential geometric element shape from a plurality of available geometric element shapes;
- based on the at least one criterion, determining one or more instances of the first potential geometric element shape to add to the portion of the integrated circuit design;
- determining that adding the one or more instances of the first potential geometric element shape to the portion of the integrated circuit design would not result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness;
- responsive to determining that adding the one or more instances of the first potential geometric element shape to the portion of the integrated circuit design would not result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness, selecting a second potential geometric element shape from the plurality of available geometric element shapes;
- based on the at least one criterion, determining one or more instances of the second potential geometric element shape to add to the portion of the integrated circuit design;
- determining that adding the one or more instances of the second potential geometric element shape to the portion of the integrated circuit design would result in the portion of the integrated circuit design having a thickness that satisfies the target thickness;
- and
- adding, by one or more computing devices, the one or more instances of the second potential geometric element shape to the portion of the integrated circuit design.
7 more elements
An apparatus, comprising:
- one or more processors;
- memory storing executable instructions configured to, when executed by the one or more processors, cause the apparatus to:
- identify a target thickness for a portion of an integrated circuit design;
- identify at least one criterion for use in controlling addition of geometric elements to the portion of the integrated circuit design;
- select a first potential geometric element shape from a plurality of available geometric element shapes;
- based on the at least one criterion, determine a one or more instances of the first potential geometric element shape to add to the portion of the integrated circuit design;
- determine that adding the one or more instances of the first potential geometric element shape to the portion of the integrated circuit design would not result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness;
- responsive to determining that adding the one or more instances of the first potential geometric element shape to the portion of the integrated circuit design would not result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness, select a second potential geometric element shape from the plurality of available geometric element shapes;
- based on the at least one criterion, determine a one or more instances of the second potential geometric element shape to add to the portion of the integrated circuit design;
- determine that adding the one or more instances of the second potential geometric element shape to the portion of the integrated circuit design would result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness;
- and
- add the one or more instances of the second potential geometric element shape to the portion of the integrated circuit design.
9 more elements
One or more computer readable storage devices, storing executable instructions configured to, when executed, cause an apparatus to:
- identify a target thickness for a portion of an integrated circuit design;
- identify at least one criterion for use in controlling addition of geometric elements to the portion of the integrated circuit design;
- select a first potential geometric element shape from a plurality of available geometric element shapes;
- based on the at least one criterion, determine one or more instances of the first potential geometric element shape to add to the portion of the integrated circuit design;
- determine that adding the one or more instances of the first potential geometric element shape to the portion of the integrated circuit design would not result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness;
- responsive to determining that adding the one or more instances of the first potential geometric element shape to the portion of the integrated circuit design would not result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness, select a second potential geometric element shape from the plurality of available geometric element shapes;
- based on the at least one criterion, determine one or more instances of the second potential geometric element shape to add to the portion of the integrated circuit design;
- determine that adding the one or more instances of the second potential geometric element shape to the portion of the integrated circuit design would result in the portion of the integrated circuit design having an estimated thickness that satisfies the target thickness;
- and
- add the one or more instances of the second potential geometric element shape to the portion of the integrated circuit design.
7 more elements
Dependencies are inferred from the claim text.