Methods of designing semiconductor devices and methods of modifying layouts of semiconductor devices
AssigneeSamsung Electronics Co., Ltd.
InventorsKyung-Tae Do, Yong-Seok Lee, Hyo-Sig Won, Jung-Yun Choi, Jong-Ho Kim
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Abstract
In a method of designing a semiconductor device, a transistor included in a layout of the semiconductor device may be selected. A biasing data may be set for changing a characteristic of the selected transistor. A design rule check (DRC) process for the layout of the semiconductor device may be performed after ignoring the biasing data. An optical proximity correction (OPC) process for the layout of the semiconductor device may be performed based on the biasing data.
Claims20
A method of designing a semiconductor device, the method comprising:
- selecting a transistor included in a layout of the semiconductor device;
- setting biasing data, related to a physical characteristic of the transistor, for changing the physical characteristic of the transistor, the setting biasing data including changing a data type of a target polygon pattern included in the transistor, the target polygon pattern corresponding to a component in the transistor;
- performing, in a processor, a design rule check (DRC) process for the layout of the semiconductor device while ignoring the biasing data;
- and
- performing, in the processor, an optical proximity correction (OPC) process for the layout of the semiconductor device based on the biasing data.
A method of modifying a layout of a semiconductor device, the method comprising:
- assigning biasing data, related to a physical characteristic of a transistor, associated with change to the physical characteristic of the transistor in the layout of the semiconductor device, the assigning biasing data including adjusting a first data type of the transistor to a second data type, the second data type corresponding to the change to the physical characteristic of the transistor;
- performing, in a processor, a design rule check (DRC) process for the layout of the semiconductor device without the biasing data;
- and
- performing, in the processor, an optical proximity correction (OPC) process for the layout of the semiconductor device based on the biasing data.
Dependencies are inferred from the claim text.