Magnetic tunnel junction with barrier cooling for magnetic read head
AssigneeHGST Netherlands B.V.
InventorsChando Park, Sangmun Oh, Zheng Gao
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Abstract
The present invention generally relates to a magnetic head having a thinner intermixing layer between a barrier layer and a magnetic layer. The method of making the magnetic head is also disclosed. The thinner intermixing layer in the magnetic head is formed by cooling the barrier layer in an atmosphere having a temperature of below 0 degrees Celsius prior to depositing the magnetic layer on the barrier layer. The thinner intermixing layer leads to a sharp interface between the barrier layer and the magnetic layer, which leads to an increased MR.
Claims19
A method for forming a magnetic head, comprising:
- depositing a barrier layer;
- cooling the barrier layer in an atmosphere having a temperature of below 0 degrees Celsius;
- forming a free layer;
- and
- annealing the magnetic head.
A method for forming a magnetic head, comprising
- depositing a barrier layer on a substrate in a first chamber;
- moving the substrate having the barrier layer thereon into a second chamber having a stage that is maintained at a temperature of below 0 degrees Celsius;
- cooling the substrate in the second chamber for a predetermined period of time;
- depositing a free layer on the barrier layer;
- and
- annealing the magnetic head.
Dependencies are inferred from the claim text.