Immersion lens holding device
AssigneeHamamatsu Photonics K.K.
InventorsIkuo Arata, Hirotoshi Terada, Toshimichi Ishizuka
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Estimating the term…
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AssigneeHamamatsu Photonics K.K.
InventorsIkuo Arata, Hirotoshi Terada, Toshimichi Ishizuka
Estimating the term…
A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.
An immersion lens supporting device for supporting an immersion lens movably in a direction perpendicular to an optical axis of an objective lens between the objective lens and a sample of an observation object, the supporting device comprising:
Dependencies are inferred from the claim text.