High-speed optical measurement apparatus

A high-speed optical measurement apparatus for measuring optical characteristics of individual measurement locations of an object or individual objects of a set of multiple objects at high speed, comprising:

• an objective lens unit for adjusting a magnitude of overall light of the individual locations of the object or the set of multiple objects and allowing the light to make its entrance;
• an optical path unit for changing a path of the light incident from the objective lens unit;
• a control circuit unit for outputting a control signal which is used to change a direction in which the light propagates by controlling the optical path unit;
• a first measurement sensor for measuring the incident light;
• a first eyepiece unit for conforming the light, which is made to be incident upon an array of multiple MEMS mirrors, that is, a Digital Micrometer Device (DMD), by the objective lens unit and the direction of which has been changed by the DMD in synchronization with a first control signal output from the control circuit unit, to a size and location of the first measurement sensor;
• a second measurement sensor for measuring the incident light;
• a second eyepiece unit for conforming the light, the direction of which has been changed by the DMD in synchronization with a second control signal, to a size and location of the second measurement sensor;
• and
• measurement sensor connections for fastening the measurement sensors so that the light incoming through each of the eyepiece units is aligned with a corresponding measurement sensor;
• wherein the control circuit unit sequentially controls mirrors corresponding to light corresponding to the individual measurement locations of the object or the individual objects of the set of multiple objects so that the light corresponding to the individual measurement locations of the object or the individual objects of the set of multiple objects may be concentrated on the first measurement sensor.