Micromagnetic device and method of forming the same
AssigneeEnpirion, Inc.
InventorsAshraf W. Lotfi, Trifon M. Liakopoulos, Robert W. Filas, Amrit Panda
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AssigneeEnpirion, Inc.
InventorsAshraf W. Lotfi, Trifon M. Liakopoulos, Robert W. Filas, Amrit Panda
Estimating the term…
A micromagnetic device includes a first insulating layer formed above a substrate, a first seed layer formed above the first insulating layer, a first conductive winding layer selectively formed above the first seed layer, and a second insulating layer formed above the first conductive winding layer. The micromagnetic device also includes a first magnetic core layer formed above the second insulating layer, a third insulating layer formed above the first magnetic core layer, and a second magnetic core layer formed above the third insulating layer. The micromagnetic device still further includes a fourth insulating layer formed above the second magnetic core layer, a second seed layer formed above the fourth insulating layer, and a second conductive winding layer formed above the second seed layer and in vias to the first conductive winding layer. The first and second conductive winding layers form a winding for the micromagnetic device.
A micromagnetic device formed on a substrate, comprising:
The micromagnetic device as recited in claim wherein said conductive winding layer is formed from copper.
Dependencies are inferred from the claim text.