Transducer
AssigneeAgency for Science, Technology and Research
InventorsJinli Qu, Ming Lin Julius Tsai, Bo Woon Jeffrey Soon
Life of this patent
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AssigneeAgency for Science, Technology and Research
InventorsJinli Qu, Ming Lin Julius Tsai, Bo Woon Jeffrey Soon
Estimating the term…
According to embodiments of the present invention, a transducer is provided. The transducer includes a first electrode, a second electrode disposed over the first electrode such that the first electrode and the second electrode form respective capacitive electrodes of a capacitor, the second electrode comprising a core portion and a peripheral portion, a third electrode disposed relative to the second electrode such that the third electrode overlaps with the peripheral portion of the second electrode, and a piezoelectric element disposed between the peripheral portion of the second electrode and the third electrode, so as to tune a tensional force provided by the piezoelectric element onto the second electrode by varying a piezoelectric voltage applied between the second electrode and the third electrode.
A transducer, comprising:
A transducer comprising:
A transducer, comprising:
Dependencies are inferred from the claim text.