Method and apparatus for processing a micro sample

A sample creating apparatus comprising:

• a stage for placing a sample;
• an ion beam barrel for irradiating a projection ion beam to the sample placed on the stage;
• a manipulator and a probe held by said manipulator;
• a probe moving mechanism for rotating the probe for holding a sample piece extracted by the projection ion beam irradiation, around an axis of the probe, and the probe is inclined with respect to at least one observed surface of the sample piece;
• a sample locating portion to which the sample piece extracted by the projection ion beam irradiation is moved and on which it is placed;
• and
• a sample chamber in which the stage, the probe and the sample locating portion are arranged,
• wherein, after rotating the probe which holds the sample piece extracted by the projection ion beam irradiation, said sample piece is moved to and placed on the sample locating portion.

A sample creating apparatus comprising:

• a stage for placing a sample;
• an ion beam barrel for irradiating a focused ion beam to the sample placed on the stage;
• a manipulator and a probe held by said manipulator;
• a probe moving mechanism for rotating the probe for holding a sample piece extracted by the focused ion beam irradiation, around an axis of the probe, and the probe is inclined with respect to at least one observed surface of the sample piece;
• an electron beam barrel for irradiating an electron beam to the sample held by the probe;
• a sample locating portion to which the sample piece extracted by the focused ion beam irradiation is moved and on which it is placed;
• and
• a sample chamber in which the stage, the probe and the sample locating portion are arranged,
• wherein, after rotating the probe which holds the sample piece extracted by the focused ion beam irradiation, said sample piece is observed by the electron beam barrel.

A sample creating apparatus comprising:

• a stage for placing a sample;
• an ion beam barrel for irradiating a projection ion beam to the sample placed on the stage;
• a manipulator and a probe held by said manipulator;
• a probe moving mechanism for rotating the probe for holding a sample piece extracted by the projection ion beam irradiation, around an axis of the probe, and the probe is inclined with respect to at least one observed surface of the sample piece;
• an electron beam barrel for irradiating an electron beam to the sample piece held by the probe;
• a sample locating portion to which the sample piece extracted by the projection ion beam irradiation is moved and on which it is placed;
• and
• a sample chamber in which the stage, the probe and the sample locating portion are arranged,
• wherein, after rotating the probe which holds the sample piece extracted by the projection ion beam irradiation, said sample piece is moved to and placed on the sample locating portion.