Mounting arrangement
AssigneeMicrosaic Systems Limited
InventorsRichard Syms, Andrew Holmes, Shane Martin O'Prey
Life of this patent
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Abstract
This invention provides a method of mounting cylindrical electrodes in the geometry of a miniature electrostatic quadrupole, which can act as a quadrupole mass filter or a quadrupole ion guide, or be used in a linear quadrupole ion trap. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. The supports include a suspended flexure system to relieve strains caused by mismatch between the thermal expansion coefficients of the electrodes and the substrate. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers.
Claims27
A microfabricated mounting arrangement supporting at least one cylindrical electrode having a lengthwise axis, the arrangement comprising a substrate having a first and a second support member configured to support and connect electrically to the at least one electrode at a first and a second end thereof, the electrode being attached to the support member, and wherein at least a portion of one of the first and second support member is adapted to flex so as to allow movement of the attached electrode parallel to its lengthwise axis to compensate for thermal coefficient differences between the electrode and the substrate.
A microfabricated mount for a miniature electrostatic quadrupole compnsing:
- a first and second insulating substrate, each substrate carrying at least four physically separated support members with electrically conducting surfaces arranged in two pairs, at least one element of each pair being partially suspended and flexible relative to the substrate;
- and wherein each pair of support members are configured to support and connect electrically to either end of a separate inserted cylindrical electrode having a lengthwise axis and which is attached to at least one end to the respective element, a flexing of the at least one element allowing a movement of the electrode attached thereto parallel to its lengthwise axis and relative to the substrate to compensate for thermal coefficient differences between the electrode and the substrate.
Dependencies are inferred from the claim text.